JPH032484Y2 - - Google Patents

Info

Publication number
JPH032484Y2
JPH032484Y2 JP1985131597U JP13159785U JPH032484Y2 JP H032484 Y2 JPH032484 Y2 JP H032484Y2 JP 1985131597 U JP1985131597 U JP 1985131597U JP 13159785 U JP13159785 U JP 13159785U JP H032484 Y2 JPH032484 Y2 JP H032484Y2
Authority
JP
Japan
Prior art keywords
clean room
room
air
clean
shelf
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985131597U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6240432U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985131597U priority Critical patent/JPH032484Y2/ja
Publication of JPS6240432U publication Critical patent/JPS6240432U/ja
Application granted granted Critical
Publication of JPH032484Y2 publication Critical patent/JPH032484Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Ventilation (AREA)
JP1985131597U 1985-08-30 1985-08-30 Expired JPH032484Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985131597U JPH032484Y2 (en]) 1985-08-30 1985-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985131597U JPH032484Y2 (en]) 1985-08-30 1985-08-30

Publications (2)

Publication Number Publication Date
JPS6240432U JPS6240432U (en]) 1987-03-11
JPH032484Y2 true JPH032484Y2 (en]) 1991-01-23

Family

ID=31030197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985131597U Expired JPH032484Y2 (en]) 1985-08-30 1985-08-30

Country Status (1)

Country Link
JP (1) JPH032484Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS605488U (ja) * 1983-06-24 1985-01-16 株式会社椿本チエイン 回転棚式清浄装置
JPS6044404A (ja) * 1983-08-17 1985-03-09 Daifuku Co Ltd クリ−ンル−ム内の荷保管設備

Also Published As

Publication number Publication date
JPS6240432U (en]) 1987-03-11

Similar Documents

Publication Publication Date Title
KR930002562B1 (ko) 클린룸내에서 사용되는 방진저장 캐비넷장치
US5401212A (en) Environmental control system
US5219215A (en) Modular clean bench system
KR880006011A (ko) 반도체 웨이퍼용 이송로보트
KR100524359B1 (ko) 클린 룸용의 물품 보관 설비
JPH05223300A (ja) 連結式クリーン空間装置
JPH032484Y2 (en])
JPH01288342A (ja) 清浄キャビネット
JP2004269214A (ja) 浄化空気通風式の保管設備
JP3818434B2 (ja) 浄化空気通風式の保管設備
JPH032483Y2 (en])
JPH0141561B2 (en])
JPH03177732A (ja) 半導体の無塵化製造システム
JPH03174713A (ja) クリーン保管庫
CN102658942A (zh) 自动仓库及自动仓库的控制方法
JPH026051Y2 (en])
JP2501262Y2 (ja) オ―バ―ヘッド型物品搬送装置
JPH09150912A (ja) クリーン装置付き荷保管設備
JP3673327B2 (ja) 無人搬送車におけるダスト侵入防止装置
JPH0719153Y2 (ja) ウェハーカセットダム装置の内部空気浄化構造
JPS62172127A (ja) 清浄保管装置
JPH0671922B2 (ja) クリ−ンル−ム用ストツカ−
JP4131378B2 (ja) 薄板状電子部品搬送装置及び薄板状電子製品製造設備
JPH0341471Y2 (en])
JPH0338585Y2 (en])